Implementing MEMS technology for soft, (bio)electronics interfaces.
Soft, bioelectronics interfaces are broadly defined as microfabricated devices with mechanical properties suited to comply with biological tissues. There are many challenges associated with the development of such technology platforms. Simultaneously one must achieve reliable electronic performance, thermal and environmental stability, mechanical compliance, and biocompatibility. Materials and system architecture must be designed such that mechanical integrity and electrical functionality is preserved during fabrication, implementation and use of the interface. Depositing and patterning conventional device materials, ranging from inorganic to organic thin films as well as nanomaterials, directly onto soft elastomeric substrates enable electronic devices with enhanced mechanical flexibility. Success in fabrication also relies on a careful design of the mechanical architecture of the soft interface to minimize mechanical stresses in the most fragile materials.