On-chip Mass Sensing at the Physical Limits of Nanoelectromechanical Systems
A tunable and self-regulating on-chip carbon nanotube based mass balance is presented for small-size and low-cost environmental and healthcare applications. Tube stretching and a phase-locked loop topology make the system widely universal and invariant to nanotube characteristics. Operational for tube eigenfrequencies up to 385MHz, the circuit integration in a 180nm technology achieves instantaneous zeptogram resolution, while yoctogram precision is obtained within the tenth of a second. These figures of merit range at the physical limits of carbon nanotube resonators.
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Record created on 2014-06-02, modified on 2016-08-09