On-chip Mass Sensing at the Physical Limits of Nanoelectromechanical Systems

A tunable and self-regulating on-chip carbon nanotube based mass balance is presented for small-size and low-cost environmental and healthcare applications. Tube stretching and a phase-locked loop topology make the system widely universal and invariant to nanotube characteristics. Operational for tube eigenfrequencies up to 385MHz, the circuit integration in a 180nm technology achieves instantaneous zeptogram resolution, while yoctogram precision is obtained within the tenth of a second. These figures of merit range at the physical limits of carbon nanotube resonators.


Published in:
2013 5Th Ieee International Workshop On Advances In Sensors And Interfaces (Iwasi), 131-135
Presented at:
5th IEEE International Workshop on Advances in Sensors and Interfaces (IWASI)
Year:
2013
Publisher:
New York, Ieee
ISBN:
978-1-4799-0041-1
978-1-4799-0039-8
Laboratories:




 Record created 2014-06-02, last modified 2018-05-03


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