Deposition, integration and application issues of ferroelectric thin films are briefly reviewed. Applications in ultrasonic micromotors and infra-red sensors are treated in more detail. Current results on stress measurements across the ferroelectric phase transition and on pyroelectric devices are presented.
Title
Ferroelectric thin films for microsystems
Published in
Proceedings of the 6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 1995
Pages
115-122
Conference
6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 9-13.10.1995
Date
1995
Publisher
Chichester, John Wiley & Sons
Record creation date
2014-05-27
