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Ferroelectric thin films for microsystems
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Ferroelectric thin films for microsystems
-
Muralt, Paul
et al
main
file(s):
1995 Muralt ECASIA Montreux - ferroelectric thin films for MEMS - postprint
version 1
1995 Muralt ECASIA Montreux - ferroelectric thin films for MEMS - postprint.pdf
[960.64 KB]
03 Nov 2020, 14:02
Postprint