000199087 001__ 199087
000199087 005__ 20190316235919.0
000199087 037__ $$aCONF
000199087 245__ $$aFerroelectric thin films for microsystems
000199087 269__ $$a1995
000199087 260__ $$bJohn Wiley & Sons$$c1995$$aChichester
000199087 336__ $$aConference Papers
000199087 520__ $$aDeposition, integration and application issues of ferroelectric thin films are briefly reviewed. Applications in ultrasonic micromotors and infra-red sensors are treated in more detail. Current results on stress measurements across the ferroelectric phase transition and on pyroelectric devices are presented.
000199087 6531_ $$areview
000199087 6531_ $$aferroelectric thin films
000199087 6531_ $$aMEMS
000199087 6531_ $$amicrosystems
000199087 6531_ $$aPZT
000199087 6531_ $$alead zirconate titanate
000199087 6531_ $$aPbTiO3
000199087 6531_ $$alead titanate
000199087 6531_ $$apiezoelectric properties
000199087 6531_ $$apyroelectric properties
000199087 6531_ $$amicromotors
000199087 6531_ $$ainfrared detection
000199087 700__ $$0240369$$g105945$$aMuralt, Paul
000199087 700__ $$0240386$$g102445$$aMaeder, Thomas
000199087 700__ $$aBrooks, Keith G.
000199087 700__ $$aKohli, Markus
000199087 700__ $$aWüthrich, Christian
000199087 7112_ $$d9-13.10.1995$$cMontreux (CH)$$a6th European Conference on Applied Surface and Interface Analysis (ECASIA)
000199087 720_1 $$aMathieu, Hans Jörg$$eed.$$g105793$$0241565
000199087 720_1 $$aReihl, B.$$eed.
000199087 720_1 $$aBriggs, D.$$eed.
000199087 773__ $$tProceedings of the 6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 1995$$q115-122
000199087 8564_ $$uhttps://infoscience.epfl.ch/record/199087/files/1995%20Muralt%20ECASIA%20Montreux%20-%20ferroelectric%20thin%20films%20for%20MEMS%20-%20postprint.pdf$$zPostprint$$s983693$$yPostprint
000199087 909C0 $$xU10334$$0252012$$pLC
000199087 909CO $$qGLOBAL_SET$$pconf$$ooai:infoscience.tind.io:199087$$pSTI
000199087 917Z8 $$x102445
000199087 937__ $$aEPFL-CONF-199087
000199087 973__ $$rNON-REVIEWED$$sPUBLISHED$$aEPFL
000199087 980__ $$aCONF