Ferroelectric thin films for microsystems

Deposition, integration and application issues of ferroelectric thin films are briefly reviewed. Applications in ultrasonic micromotors and infra-red sensors are treated in more detail. Current results on stress measurements across the ferroelectric phase transition and on pyroelectric devices are presented.


Editor(s):
Mathieu, Hans Jörg
Reihl, B.
Briggs, D.
Published in:
Proceedings of the 6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 1995, 115-122
Presented at:
6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 9-13.10.1995
Year:
1995
Publisher:
Chichester, John Wiley & Sons
Keywords:
Laboratories:




 Record created 2014-05-27, last modified 2018-03-17

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