Ferroelectric thin films for microsystems

• Presented at: 6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 9-13.10.1995
• Published in: Proceedings of the 6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 1995, p. 115-122
• Chichester: John Wiley & Sons, 1995

Deposition, integration and application issues of ferroelectric thin films are briefly reviewed. Applications in ultrasonic micromotors and infra-red sensors are treated in more detail. Current results on stress measurements across the ferroelectric phase transition and on pyroelectric devices are presented.

Keywords: review ; ferroelectric thin films ; MEMS ; microsystems ; PZT ; lead zirconate titanate ; PbTiO3 ; lead titanate ; piezoelectric properties ; pyroelectric properties ; micromotors ; infrared detection

Reference

• EPFL-CONF-199087

Record created on 2014-05-27, modified on 2017-05-10