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Ferroelectric thin films for microsystems

Muralt, Paul ; Maeder, Thomas ; Brooks, Keith G. ; Kohli, Markus ; Wüthrich, Christian ; Mathieu, Hans Jörg ; Reihl, B. ; Briggs, D.

Deposition, integration and application issues of ferroelectric thin films are briefly reviewed. Applications in ultrasonic micromotors and infra-red sensors are treated in more detail. Current results on stress measurements across the ferroelectric phase transition and on pyroelectric devices are presented.


Editor(s):
Mathieu, Hans Jörg
Reihl, B.
Briggs, D.
Published in:
Proceedings of the 6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 1995, 115-122
Presented at:
6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 9-13.10.1995
Year:
1995
Publisher:
Chichester, John Wiley & Sons
Keywords:
review ; ferroelectric thin films ; MEMS ; microsystems ; PZT ; lead zirconate titanate ; PbTiO3 ; lead titanate ; piezoelectric properties ; pyroelectric properties ; micromotors ; infrared detection
Laboratories:
LC

Record appears in:
Scientific production and competences > STI - School of Engineering > IMX - Institute of Materials > LC - Ceramics Laboratory
Conference Papers
Work produced at EPFL
Published



 Record created 2014-05-27, last modified 2019-03-16

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