Ferroelectric thin films for microsystems
Deposition, integration and application issues of ferroelectric thin films are briefly reviewed. Applications in ultrasonic micromotors and infra-red sensors are treated in more detail. Current results on stress measurements across the ferroelectric phase transition and on pyroelectric devices are presented.
Editor(s):
Mathieu, Hans Jörg
Reihl, B.
Briggs, D.
Published in:
Proceedings of the 6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 1995, 115-122
Presented at:
6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 9-13.10.1995
Publisher:
Chichester, John Wiley & Sons
Keywords:
Laboratories:
Record created 2014-05-27, last modified 2018-09-13
