Files

Abstract

Pb(Zr1–xTix)O3 thin films (x = 0.55 and 0.85) were prepared on fine grained, polished ZrO2 ceramic substrates by a sol-gel method. The high thermal expansion of ZrO2 relative to Si allows the preparation of thicker PZT films with reduced thermal stress. For the x = 0.85 films, this reduction of thermal stress gives a preference of (001) over (100) oriented domains. For x = 0.55 films, square P–E hysteresis loops were obtained with: Pr = 36 µC/Cm2, and Ec = 45 kV/cm, at a field of 160 kV/cm. Pyroelectric figures of merit, defined as P/eps, of 0.93 were measured for a 4.0 µm thick Pb(Zr0.15Ti0.85)O3 film. The measured properties were comparable to those of highly (111) oriented films on Si. Thus, the (001) texture must be increased in order to realize improved properties.

Details

Actions

Preview