000198937 001__ 198937
000198937 005__ 20190812205757.0
000198937 020__ $$a978-0-901716-79-8
000198937 037__ $$aCONF
000198937 245__ $$aPb(Zr,Ti)O3 thin films by in-situ reactive sputtering on micromachined membranes for micromechanical applications
000198937 269__ $$a1995
000198937 260__ $$bThe Institute of Materials / Maney Publishing$$c1995
000198937 336__ $$aConference Papers
000198937 490__ $$aBritish Ceramic Proceedings$$v54
000198937 520__ $$aFor micromechanical applications, piezoelectric PbZrTO3 (PZT) thin films have been deposited on metallised Si3N4/SiO2 layers on Si wafers. Films with compositions near the morphotropic phase boundary (x=0.53) were prepared at 600°C using a multitarget, in-situ, reactive deposition process. The PZT films were optimised with respect to Pb/(Zr+Ti) flux and Zr content. Within certain processing limits, the lead content was found to be self-stabilising, e.g. any excess lead re-evaporated from the substrate, resulting in essentially single phase films. The crystallisation and orientation were improved by the presence of a PbTiO3 - rich seed layer, which allowed the deposition of films with >95% <100>/<001> orientation. Membranes with piezoelectric films were micromachined by chemically etching the Si substrate. The piezoelectric response, i.e. the deflections, of the resulting membranes were measured as a function of applied voltage and frequency using an interferometer.
000198937 6531_ $$aPZT
000198937 6531_ $$aFilms minces piezoélectriques
000198937 6531_ $$aPiezoelectric thin films
000198937 6531_ $$aSputtering
000198937 6531_ $$aPulvérisation
000198937 700__ $$0240386$$g102445$$aMaeder, Thomas
000198937 700__ $$0240369$$g105945$$aMuralt, Paul
000198937 700__ $$aKohli, Markus
000198937 700__ $$aKholkin, Andrei
000198937 700__ $$g106416$$aSetter, Nava$$0240019
000198937 7112_ $$d19-20.12.1994$$cSheffield (UK)$$aCeramic films and coatings
000198937 720_1 $$aLee, W. E.$$eed.
000198937 773__ $$tCeramic Films and Coatings$$q207-218
000198937 8564_ $$zn/a$$yPostprint$$uhttps://infoscience.epfl.ch/record/198937/files/1995%20Maeder%20BCP%20Sheffield%20-%20films%20minces%20pi%C3%A9zo%C3%A9lectriques%20PZT%20sur%20membranes%20Si%20MEMS%20-%20perso.pdf$$s617050
000198937 909C0 $$xU10334$$pLC$$0252012
000198937 909CO $$ooai:infoscience.tind.io:198937$$qGLOBAL_SET$$pconf$$pSTI
000198937 917Z8 $$x102445
000198937 937__ $$aEPFL-CONF-198937
000198937 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000198937 980__ $$aCONF