Thin piezoelectric films for micro-electromechanical components

PbZrxT1-x O3 (PZT) films on silicon substrates can be used for various micro mechanical devices. An insitu reactive sputter deposition process at 600°C has been developed for this application. Three magnetron sources with metal targets have been applied simultaneously. Within a certain process window, the [Pb] / ([Zr]+[Ti]) ratio in the film is self stabilized at stoichiometry by desorption of the excess Pb. Films of up to 1 micron thickness have been fabricated. For the composition x = 0.4 the films exhiba a remanent polarization of 20 to 25 µC/cm2, a dielectric constant of 1100 and a piezoelectric coefficient of 40 pC/N. The classical Pt/Ti bottom electrode needed to be improved by an additional layer of TiO2 between Ti and Pt. As a second choice the metallic oxide RuO2 has been investigated, too. PZT films on prototype membrane structures are currently processed. They will be applied in prototype micromotors for the watch industry.


Editor(s):
Ilschner, ‪‪Bernhard
Hofmann, ‪ Margarethe
Meyer-Olbersleben, Frank
Published in:
Proceedings of the First Swiss Conference on Materials Research for Engineering Systems, 142-146
Presented at:
First Swiss Conference on Materials Research for Engineering Systems, Sion (CH), 8-9.9.1994
Year:
1994
Publisher:
Hallwag
ISBN:
3444104367, 9783444104367
Keywords:
Laboratories:




 Record created 2014-05-20, last modified 2018-03-17

Postprint:
Download fulltext
PDF

Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)