Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions

This work reports on irradiations made on silicon bulk-acoustic wave resonators. The resonators were based on a tuning fork geometry and actuated by a piezoelectric aluminum nitride layer. They had a resonance frequency of 150 kHz and a quality factor of about 20000 under vacuum. The susceptibility of the devices to radiation induced degradation was investigated using 60Co γ-rays and 50 MeV protons with space-relevant doses of up to 170 krad. The performance of the devices after irradiation indicated a high tolerance to both ionizing damage and displacement damage effects. The results support the efforts towards design and fabrication of highly reliable MEMS devices for space applications.

Published in:
Proc. of SPIE, 8975, 89750I
Presented at:
SPIE Photonis West 2014, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII,, San Francisco, 1 2014

Note: The status of this file is: EPFL only

 Record created 2014-03-28, last modified 2018-09-13

Download fulltext

Rate this document:

Rate this document:
(Not yet reviewed)