000196219 001__ 196219
000196219 005__ 20190622132344.0
000196219 0247_ $$a10.1117/12.2031229$$2doi
000196219 037__ $$aCONF
000196219 245__ $$aSilicon nanowires reliability and robustness investigation using AFM-based techniques
000196219 269__ $$a2013
000196219 260__ $$c2013
000196219 336__ $$aConference Papers
000196219 520__ $$aSilicon nanowires (SiNWs) have undergone intensive research for their application in novel integrated systems such as field effect transistor (FET) biosensors and mass sensing resonators profiting from large surface-to-volume ratios (nano dimensions). Such devices have been shown to have the potential for outstanding performances in terms of high sensitivity, selectivity through surface modification and unprecedented structural characteristics. This paper presents the results of mechanical characterization done for various types of suspended SiNWs arranged in a 3D array. The characterization has been performed using techniques based on atomic force microscopy (AFM). This investigation is a necessary prerequisite for the reliable and robust design of any biosensing system. This paper also describes the applied investigation methodology and reports measurement results aggregated during series of AFM-based tests. © 2013 SPIE.
000196219 700__ $$aBieniek, T.
000196219 700__ $$aJanczyk, G.
000196219 700__ $$aJanus, P.
000196219 700__ $$aGrabiec, P.
000196219 700__ $$aNieprzecki, M.
000196219 700__ $$aWielgoszewski, G.
000196219 700__ $$aMoczala, M.
000196219 700__ $$aGotszalk, T.
000196219 700__ $$aBuitrago, E.
000196219 700__ $$aBadia, M. F.-B.
000196219 700__ $$g122431$$aIonescu, A. M.$$0241430
000196219 773__ $$tProceedings of SPIE - The International Society for Optical Engineering$$j8902
000196219 909CO $$pSTI$$pconf$$ooai:infoscience.tind.io:196219
000196219 909C0 $$xU10328$$pNANOLAB$$0252177
000196219 917Z8 $$x206855
000196219 937__ $$aEPFL-CONF-196219
000196219 973__ $$sPUBLISHED$$rREVIEWED$$aOTHER
000196219 980__ $$aCONF