195678
20190416055539.0
US8327312
B2
US
20121204
US2012030643
A1
US
20120202
45528008
EPO Family ID
PATENT
Assessing printability of a very-large-scale integration design
2012
United States Patent and Trademark Office
2012
Patents
Printability of a very-large-scale integration design is assessed by: during a training phase, generating a training set of very-large-scale integration design shapes representative of a population of very-large-scale integration design shapes, obtaining a set of mathematical representations of respective shapes in the training set, identifying at least two classes of physical events causally linked to the printability for the very-large-scale integration design shapes, each of the classes being associated to a respective level of printability, labeling each mathematical representation of the set according to one of the identified classes, based on a lithography model, and selecting a probabilistic model function maximizing a probability of a class, given the set of mathematical representations; and during a testing phase, providing a very-large-scale integration design shape to be tested, testing the provided very-large-scale integration design shape, and labeling the provided very-large-scale integration design shape according to the identified class.
Kryszczuk, Krzysztof
Hurley, Paul
Ranieri, Juri
196523
244415
Scheibler, Robin
161208
246726
n/a
1259150
n/a
http://infoscience.epfl.ch/record/195678/files/US8327312.pdf
ISC
252435
U10423
oai:infoscience.epfl.ch:195678
GLOBAL_SET
161208
148230
EPFL-PATENT-195678
OTHER
PATENT