000195678 001__ 195678
000195678 005__ 20190416055539.0
000195678 013__ $$d20121204$$bUS$$cB2$$aUS8327312
000195678 013__ $$d20120202$$bUS$$cA1$$aUS2012030643
000195678 02470 $$2EPO Family ID$$a45528008
000195678 037__ $$aPATENT
000195678 245__ $$aAssessing printability of a very-large-scale integration design
000195678 269__ $$a2012
000195678 260__ $$bUnited States Patent and Trademark Office$$c2012
000195678 336__ $$aPatents
000195678 520__ $$aPrintability of a very-large-scale integration design is assessed by: during a training phase, generating a training set of very-large-scale integration design shapes representative of a population of very-large-scale integration design shapes, obtaining a set of mathematical representations of respective shapes in the training set, identifying at least two classes of physical events causally linked to the printability for the very-large-scale integration design shapes, each of the classes being associated to a respective level of printability, labeling each mathematical representation of the set according to one of the identified classes, based on a lithography model, and selecting a probabilistic model function maximizing a probability of a class, given the set of mathematical representations; and during a testing phase, providing a very-large-scale integration design shape to be tested, testing the provided very-large-scale integration design shape, and labeling the provided very-large-scale integration design shape according to the identified class.
000195678 700__ $$aKryszczuk, Krzysztof
000195678 700__ $$aHurley, Paul
000195678 700__ $$0244415$$g196523$$aRanieri, Juri
000195678 700__ $$aScheibler, Robin$$0246726$$g161208
000195678 8564_ $$uhttps://infoscience.epfl.ch/record/195678/files/US8327312.pdf$$zn/a$$s1259150$$yn/a
000195678 909C0 $$0252435$$pISC$$xU10423
000195678 909CO $$qGLOBAL_SET$$ooai:infoscience.epfl.ch:195678
000195678 917Z8 $$x161208
000195678 917Z8 $$x148230
000195678 937__ $$aEPFL-PATENT-195678
000195678 973__ $$aOTHER
000195678 980__ $$aPATENT