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Method and system for computing Fourier series coefficients for mask layouts using FFT
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Method and system for computing Fourier series coe[...]
-
Scheibler, Robin
et al
main
file(s):
patent_2013_US8402399B2
version 1
patent_2013_US8402399B2.pdf
[710.38 KB]
27 Jan 2018, 12:28
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