Ceramic modules for sensors, fluidics & packages in harsh environments


Published in:
MEMS Technology Review, 8, 10-13
Year:
2011
Keywords:
Note:
Invited paper in industry journal, presents our work in ceramic modules
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2013-11-14, last modified 2018-09-13

Associated presentation, 2011 MAM Micronarc Alpine Meeting, Villars-sur-Ollon (CH):
Download fulltextPDF
Preprint:
Download fulltextPDF
Publisher's version:
Download fulltextPDF
Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)