Structuration of LTCC for integrated fluidics and micromechanical devices
2006
Files
Abstract
1) Introduction 2) Common technological issues 3) Devices 4) Microreactors & mixers - shaping of LTCC 5) Membranes & “resistors” - C sacrificial layers 6) Force sensors - shaping of LTCC 7) Conclusions
Details
Title
Structuration of LTCC for integrated fluidics and micromechanical devices
Author(s)
Maeder, Thomas ; Fournier, Yannick ; Birol, Hansu ; Jacq, Caroline ; Corradini, Giancarlo ; Ryser, Peter
Conference
1st MacroNano Colloquium on LTCC RF- and Microsystem Interconnect, Ilmenau, Germany, 29-30.11.2006
Date
2006
Keywords
Note
Présentation invitée - méthodes de structuration 3D du LTCC Invited talk - 3D structuration methods for LTCC
Laboratories
LPM
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LPM - Laboratory of Microengineering for Manufacturing
Presentations & Talks
Work produced at EPFL
Presentations & Talks
Work produced at EPFL
Record creation date
2013-11-12