Structuration of LTCC for integrated fluidics and micromechanical devices
Maeder, Thomas; Fournier, Yannick; Birol, Hansu; Jacq, Caroline; Corradini, Giancarlo; Ryser, Peter
2006

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Abstract

1) Introduction 2) Common technological issues 3) Devices 4) Microreactors & mixers - shaping of LTCC 5) Membranes & “resistors” - C sacrificial layers 6) Force sensors - shaping of LTCC 7) Conclusions

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Title Structuration of LTCC for integrated fluidics and micromechanical devices
Author(s) Maeder, Thomas ; Fournier, Yannick ; Birol, Hansu ; Jacq, Caroline ; Corradini, Giancarlo ; Ryser, Peter
Conference 1st MacroNano Colloquium on LTCC RF- and Microsystem Interconnect, Ilmenau, Germany, 29-30.11.2006
Date 2006
Keywords
Note Présentation invitée - méthodes de structuration 3D du LTCC Invited talk - 3D structuration methods for LTCC
Laboratories LPM
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LPM - Laboratory of Microengineering for Manufacturing
Presentations & Talks
Work produced at EPFL
Record creation date 2013-11-12

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