Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

A micromirror array composed of 2048 silicon micromirrors measuring 200 x 100 mu m(2) and tilting by 25 degrees was developed as a reconfigurable slit mask for multi-object spectroscopy (MOS) in astronomy. The fill factor, contrast, and mirror deformation at both room and cryogenic temperatures were investigated. Contrast was measured using an optical setup that mimics a MOS instrument, and mirror deformation was characterized using a Twyman-Green interferometer. The results indicate that the array exhibited a fill factor of 82%, a contrast ratio of 1000:1, and surface mirror deformations of 8 nm and 27 nm for mirrors tilted at 298 K and 162 K, respectively. (c) 2013 Optical Society of America


Published in:
Optics Express, 21, 19, 22400
Year:
2013
Publisher:
Washington, Optical Society of America
ISSN:
1094-4087
Laboratories:




 Record created 2013-10-03, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)