Vertical cavity surface emitting devices incorporating wafer fused reflectors
Sirbu, Alexei; Mereuta, Alexandru; Caliman, Andrei
2013

Abstract

The invention refers to a method of manufacturing an optoelectronic device and in particular a method of manufacturing a vertical cavity surface emitting device incorporating wafer fused reflectors.

Details

Title Vertical cavity surface emitting devices incorporating wafer fused reflectors
Author(s) Sirbu, Alexei ; Mereuta, Alexandru ; Caliman, Andrei
Pagination 15
Date 2013
Publisher Ecole Polytechnique Federale de Lausanne
Keywords
Note Alternative title(s) : (de) Oberflächenemittierende vorrichtungen mit vertikalem resonator und durch waferverbundtechnik hergestellten spiegeln (fr) Dispositifs à émission par la surface et à cavité verticale avec des miroirs fabriqués par fusion de wafers
Other identifier(s) EPO Family ID: 42364568
Patent number(s) US8652936 (B2)
EP2449638 (B1)
US2012134381 (A1)
EP2449638 (A1)
WO2011000568 (A1)
Laboratories LPN
TTO
Record Appears in Scientific production and competences > SB - School of Basic Sciences > SB Archives > LPN - Laboratory of the Physics of Nanostructures
Scientific production and competences > Non-academic units > TTO - Technology Transfer Office
Work produced at EPFL
Patents
Record creation date 2013-09-23

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