All through stencil MOSFET fabrication
2009
Details
Title
All through stencil MOSFET fabrication
Author(s)
Villanueva, L. G. ; Vazquez-Mena, O. ; Montserrat, J. ; Savu, V. ; Sidler, K. ; Bausells, J. ; Brugger, J.
Conference
Fall meeting of the American Vacuum Society (AVS), San Jose, CA, USA, 2009
Date
2009
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Presentations & Talks
Peer-reviewed publications
Work outside EPFL
Published
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Presentations & Talks
Peer-reviewed publications
Work outside EPFL
Published
Record creation date
2013-08-06