FIB and DRIE combination for nanotip fabrication
2005
Details
Title
FIB and DRIE combination for nanotip fabrication
Author(s)
Villanueva, G. ; Plaza, J. A. ; Sanchez-Amores, A. ; Bausells, J. ; Martinez, E. ; Samitier, J. ; Errachid, A.
Published in
5th Spanish Conference on Electron Devices (CDE)
Pages
443-446
Conference
5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005
Date
2005
Note
Times Cited: 0, 5th Spanish Conference on Electron Devices, FEB 02-04, 2005, Tarragona, SPAIN
Laboratories
NEMS
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2013-08-06