000187904 001__ 187904
000187904 005__ 20190812205716.0
000187904 0247_ $$2doi$$a10.1016/j.mee.2007.01.078
000187904 022__ $$a0167-9317
000187904 037__ $$aCONF
000187904 245__ $$aDRIE based novel technique for AFM probes fabrication
000187904 260__ $$c2006
000187904 269__ $$a2006
000187904 336__ $$aConference Papers
000187904 520__ $$aWe report on the fabrication of atomic force microscopy (AFM) probes using a novel technology that performs every machining step by means of one single deep reactive ion etching (DRIE) equipment. Specific etching conditions are optimized in order to define rocket tips (apex and shaft parts of the tip are etched separately). Then, those rocket tips are fabricated on cantilevers obtaining finally complete AFM probes. DRIE is also used to shape the cantilevers and to machine the whole silicon wafer. Very high yield and very high uniformity are obtained because of the use of dry etchings. Customized fabrication of AFM probes with similar features than the reference ones is demonstrated. (c) 2007 Elsevier B.V. All rights reserved.
000187904 6531_ $$aafm probes
000187904 6531_ $$adrie
000187904 6531_ $$aatomic-force microscope
000187904 6531_ $$alocal oxidation
000187904 6531_ $$asilicon
000187904 6531_ $$atips
000187904 6531_ $$aoscillation
000187904 6531_ $$aaccess
000187904 6531_ $$amodes
000187904 700__ $$0240380$$g176631$$aVillanueva, G.
000187904 700__ $$aPlaza, J. A.
000187904 700__ $$aSanchez, A.
000187904 700__ $$aZinoviev, K.
000187904 700__ $$aPerez-Murano, F.
000187904 700__ $$aBausells, J.
000187904 7112_ $$d2006$$cBarcelona, Spain$$a32nd International Conference on Micro- and Nano- Engineering (MNE)
000187904 773__ $$j84$$t32nd International Conference on Micro- and Nano- Engineering (MNE)$$k5-8$$q1132-1135
000187904 909C0 $$xU12739$$pNEMS$$0252546
000187904 909CO $$pconf$$pSTI$$ooai:infoscience.tind.io:187904
000187904 917Z8 $$x176631
000187904 937__ $$aEPFL-CONF-187904
000187904 973__ $$rREVIEWED$$sPUBLISHED$$aOTHER
000187904 980__ $$aCONF