Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection

We report the development of piezoresistive cantilevers for intermolecular force detection in biochemical sensing, by using a commercial CMOS technology. The detection of the small forces involved in molecular recognition requires cantilevers with a small spring constant and high force sensitivity. We have fabricated polycrystalline silicon cantilevers by using the two polysilicon layers of a commercial CMOS process with minimum design rule widths. The cantilevers have been released by post-process micromachining. The upper polysilicon layer has been used as a piezoresistor. CMOS amplifying circuits have been integrated on-chip with the cantilever structures. The cantilevers have small spring constants ranging from 1.5 to 12 mN/m. The complete system has been successfully tested by applying a known transverse displacement with an AFM tip. A force sensitivity of 8 mu V/pN and resolution of 50 pN has been obtained. This high resolution is obtained with CMOS polysilicon, which has a relatively low piezoresistive coefficient, but this is compensated by the integration of signal-processing circuitry. (c) 2006 Elsevier B.V. All rights reserved.

Published in:
Microelectronic Engineering, 83, 4-9, 1302-1305
Bausells, J CSIC, IMB, Ctr Nacl Microelect, Campus UAB, Barcelona 08193, Spain CSIC, IMB, Ctr Nacl Microelect, Barcelona 08193, Spain ETH, Phys Elect Lab, CH-8093 Zurich, Switzerland
Times Cited:0
Cited References Count:17

 Record created 2013-08-06, last modified 2020-04-20

Rate this document:

Rate this document:
(Not yet reviewed)