Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometers
2007
Details
Title
Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometers
Author(s)
Llobera, A. ; Villanueva, G. ; Cadarso, V. J. ; Seidemann, V. ; Buttgenbach, S. ; Plaza, J. A.
Published in
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Volume
Poster
Pages
U544-U545
Conference
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Lyon, France, 2007
Date
2007
ISBN
978-1-4244-0841-2
Note
Llobera, A. Villanueva, G. Cadarso, V. J. Seidemann, V. Buettgenbach, S. Plaza, J. A., 14th International Conference on Solid-State Sensors, Actuators and Microsystems, JUN 10-14, 2007, Lyon, FRANCE
Laboratories
NEMS
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2013-08-06