Focused ion beam production of nanoelectrode arrays
2005
Details
Title
Focused ion beam production of nanoelectrode arrays
Author(s)
Errachid, A. ; Mills, C. A. ; Pla, M. ; Martínez, E. ; Villanueva, G. ; Bausells, J. ; Samitier, J.
Conference
19th European Conference on Sensors and Actuators (Eurosensors), Barcelona, Spain, 2005
Date
2005
Laboratories
NEMS
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Work outside EPFL
Published
Posters
Peer-reviewed publications
Work outside EPFL
Published
Posters
Record creation date
2013-08-06