Silicon micromachined ultrasonic transducer for cutting applications with improved power transfer
2012
Details
Title
Silicon micromachined ultrasonic transducer for cutting applications with improved power transfer
Author(s)
Friedrich, F. ; Lockhart, R. ; Briand, D. ; Isarakorn, D. ; Margairaz, P. ; Sandoz, J.-P. ; Brossard, J. ; Keppner, H. ; Olson, W. ; Dietz, T. ; de Rooij, N. F. ; Bruger, J.
Published in
Proceedings of IEEE International Ultrasonics Symposium IUS
Volume
1
Pages
1169-1172
Conference
IEEE International Ultrasonics Symposium IUS, Dresden, Germany, Oct 7-10, 2012
Date
2012
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2013-05-17