E-beam lithography and electrodeposition fabrication of thick nanostructured devices
2007
Details
Title
E-beam lithography and electrodeposition fabrication of thick nanostructured devices
Author(s)
Lo, T. N. ; Chen, Y. T. ; Chiu, C. W. ; Liu, C. J. ; Wu, S. R. ; Lin, I. K. ; Su, C. I. ; Chang, W. D. ; Hwu, Y. ; Shew, B. Y. ; Chiang, C. C. ; Je, J. H. ; Margaritondo, G.
Published in
Journal of Physics D: Applied Physics
Volume
40
Issue
10
Pages
3172-3176
Date
2007
ISSN
1361-6463
Keywords
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SB Archives > LPRX - X-Ray Physics Laboratory
Scientific production and competences > SB - School of Basic Sciences > CIBM - Biomedical Imaging Research Center
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Scientific production and competences > SB - School of Basic Sciences > CIBM - Biomedical Imaging Research Center
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2013-04-25