LTCC-Based Sensors for Mechanical Quantities

Besides their excellent dielectric and thermo-mechanical characteristics Low Temperature Cofiring Ceramics (LTCC) are also well suited for the fabrication of 3D micromechanical components such as sensors for mechanical quantities. This paper describes the development of such sensors covering some material and technological aspects. Furthermore, the design process for mechanical sensors is discussed as well as application examples of sensors for the detection of pressure, force, acceleration and flow.


Published in:
Informacije Midem-Journal of Microelectronics, Electronic Components and Materials, 42, 4, 260-271
Year:
2012
Publisher:
Ljubljjana, Soc Microelectronics, Electron Components Materials-Midem
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2013-04-15, last modified 2018-01-28

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