000185269 001__ 185269
000185269 005__ 20180913061822.0
000185269 020__ $$a978-0-8194-9151-0
000185269 0247_ $$2doi$$a10.1117/12.927144
000185269 022__ $$a0277-786X
000185269 02470 $$2ISI$$a000312415800046
000185269 037__ $$aCONF
000185269 245__ $$aLarge micromirror array for generating programmable slit masks for Multi-Object Spectroscopy
000185269 260__ $$bSpie-Int Soc Optical Engineering$$c2012$$aBellingham
000185269 269__ $$a2012
000185269 300__ $$a12
000185269 336__ $$aConference Papers
000185269 490__ $$aProceedings of SPIE
000185269 520__ $$aMulti-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for the study of the formation and evolution of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are engaged in a European development of micromirror arrays (MMA) for generating reflective slit masks in future MOS, called MIRA. The 100 x 200 mu m(2) micromirrors are electrostatically tilted providing a precise angle. The main requirements are cryogenic environment capabilities, precise and uniform tilt angle over the whole device, uniformity of the mirror voltage-tilt hysteresis and a low mirror deformation. A first M MA with single-crystal silicon micromirrors was successfully designed, fabricated and tested. A new generation of micromirror arrays composed of 2048 micromirrors (32 x 64) and modelled for individual addressing were fabricated using fusion and eutectic wafer-level bonding. These micromirrors without coating show a peak-to-valley deformation less than 10 nm, a tilt angle of 24 degrees for an actuation voltage of 130 V Individual addressing capability of each mirror has been demonstrated using a line-column algorithm based on an optimized voltage-tilt hysteresis. Devices are currently packaged, wire-bonded and integrated to a dedicated electronics to demonstrate the individual actuation of all micromirrors on an array. An operational test of this large array with gold coated mirrors has been done at cryogenic temperature (162 K): the micromirrors were actuated successfully before, during and after the cryogenic experiment. The micromirror surface deformation was measured at cryo and is below 30 nm peak-to-valley.
000185269 6531_ $$aMOEMS
000185269 6531_ $$aMEMS
000185269 6531_ $$amicromirror
000185269 6531_ $$alarge array
000185269 6531_ $$amulti-object spectroscopy
000185269 6531_ $$acryogenic application
000185269 6531_ $$aprogrammable slit mask
000185269 700__ $$0243298$$g152927$$aCanonica, Michael
000185269 700__ $$aZamkotsian, Frederic
000185269 700__ $$aLanzoni, Patrick
000185269 700__ $$0243292$$g155722$$aNoell, Wilfried
000185269 700__ $$0243301$$g104887$$ade Rooij, Nico
000185269 7112_ $$dJuly 1-6, 2012$$cAmsterdam, Netherlands$$aModern Technologies in Space-and Ground-Based Telescopes and Instrumentation II
000185269 720_1 $$aNavarro, R.$$eed.
000185269 720_1 $$aCunningham, Cr$$eed.
000185269 720_1 $$aPrieto, E.$$eed.
000185269 773__ $$j8450$$tModern Technologies In Space-And Ground-Based Telescopes And Instrumentation Ii
000185269 909C0 $$0252173$$pSAMLAB$$xU10329
000185269 909CO $$pconf$$ooai:infoscience.tind.io:185269
000185269 917Z8 $$x190047
000185269 937__ $$aEPFL-CONF-185269
000185269 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000185269 980__ $$aCONF