High throughput screening platform for ultra large scale integration based on high-k silicon nanowire ISFET and 3D integration
2013
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Title
High throughput screening platform for ultra large scale integration based on high-k silicon nanowire ISFET and 3D integration
Author(s)
Zervas, Michail
Advisor(s)
Date
2013
Publisher
Lausanne, EPFL
Keywords
Language
English
Other identifier(s)
urn: urn:nbn:ch:bel-epfl-thesis5660-3
Laboratories
LSM
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSM - Microelectronic Systems Laboratory
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Record creation date
2013-03-07