Reflow Of Non-Circular Nano-Pillars To Fabricate Nano-Scale Solid Immersion Lenses

We investigate the reflow of non-circular, i.e., triangular and square, shaped pillars to fabricate nano-scale solid immersion lenses (SILs). Electron beam lithography (EBL) and thermal reflow are the core of the fabrication process. For the optical characterization at lambda = 642 nm, nano-SILs are replicated on a transparent substrate by soft lithography. The focal spots produced by the nano-SILs show both spot-size reduction and peak-intensity enhancement, which are consistent with the immersion effect.


Published in:
2012 International Conference On Optical Mems And Nanophotonics (Omn), 119-120
Presented at:
International Conference on Optical MEMS and Nanophotonics (OMN)
Year:
2012
Publisher:
New York, Ieee
ISBN:
978-1-4577-1513-6
Laboratories:




 Record created 2013-02-28, last modified 2018-03-17

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