Large micromirror array designed and tested for Multi-Object Spectroscopy

MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.


Published in:
International Conference On Optical Mems And Nanophotonics (OMN), 1, 115-116
Presented at:
International Conference on Optical MEMS and Nanophotonics (OMN), Banff, Canada, August 6-9, 2012
Year:
2012
Publisher:
New York, Ieee
ISBN:
978-1-4577-1513-6
Keywords:
Laboratories:




 Record created 2013-02-27, last modified 2018-03-17


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