Large micromirror array designed and tested for Multi-Object Spectroscopy
Canonica, Michael; Zamkotsian, Frederic; Lanzoni, Patrick; Noell, Wilfried
2012

Abstract

MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.

Details

Title Large micromirror array designed and tested for Multi-Object Spectroscopy
Author(s) Canonica, Michael ; Zamkotsian, Frederic ; Lanzoni, Patrick ; Noell, Wilfried
Published in International Conference On Optical Mems And Nanophotonics (OMN)
Pagination 2
Volume 1
Pages 115-116
Conference International Conference on Optical MEMS and Nanophotonics (OMN), Banff, Canada, August 6-9, 2012
Date 2012
Publisher New York, Ieee
ISBN 978-1-4577-1513-6
Keywords
DOI https://doi.org/10.1109/OMEMS.2012.6318829
Other identifier(s) View record in Web of Science
Laboratories SAMLAB
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date 2013-02-27

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