Texturing the glass surface is a promising method for improving the light trapping properties of superstrate thin-film silicon solar cells, as it enables thinner absorber layers and, possibly, higher cell efficiencies. In this paper we present the optical and morphological properties of borosilicate glass superstrates textured with the aluminium induced texture (AIT) method. High haze values are achieved without any reduction in the total optical transmission of the glass sheets after the AIT process. Scanning electron microscope and atomic force microscope (AFM) measurements reveal a laterally uniform surface morphology of the AIT texture. We demonstrate that the surface roughness and thus the transmission haze can be controlled by adjusting the AIT process parameters. From the AFM images, we extract histograms of the local height and angle distributions of the texture. Samples with a wide angle distribution are shown to produce the highest optical haze. The results of this analysis provide a better understanding of the correlation between the AIT process parameters and the resulting surface morphology. This analysis is further extended to an amorphous silicon pin solar cell deposited onto the textured glass substrate. (C) 2012 The Japan Society of Applied Physics