000183188 001__ 183188
000183188 005__ 20181203022931.0
000183188 022__ $$a1057-7149
000183188 037__ $$aARTICLE
000183188 245__ $$aSurface reconstruction from microscopic images in optical lithography
000183188 269__ $$a2014
000183188 260__ $$bInstitute of Electrical and Electronics Engineers$$c2014
000183188 336__ $$aJournal Articles
000183188 520__ $$aWe propose a shape-from-shading method to reconstruct surfaces of silicon wafers from images of printed circuits taken with scanning electron microscope. Our method combines the physical model of the optical acquisition system with prior knowledge about the shapes of the patterns in the circuit. The reconstruction of the surface is formulated as an optimization problem with a combined criterion based on the irradiance equation and a shape prior that constrains the shape of the surface to agree with the expected shape of the pattern. To account for the variability of the manufacturing process, the model allows a non-linear elastic deformation between the expected patterns and the reconstructed surface. Our method provides two outputs: a reconstructed surface and a deformation field. The reconstructed surface is derived from the shading observed in the images and the prior knowledge about circuit patterns, which results in a shape-from-shading technique stable and robust to noise. The deformation field produces a mapping between the expected shape and the reconstructed surface, which provides a measure of deviation between the models and the real manufacturing process.
000183188 6531_ $$ashape-from-shading
000183188 6531_ $$ascanning electron microscope
000183188 6531_ $$ashape-prior
000183188 6531_ $$asurface reconstruction
000183188 6531_ $$aLTS5
000183188 700__ $$0242935$$aEstellers Casas, Virginia$$g182750
000183188 700__ $$0240323$$aThiran, Jean-Philippe$$g115534
000183188 700__ $$aGabrani, Maria
000183188 773__ $$j23$$k8$$q3560 - 3573$$tIEEE Transactions on Image Processing
000183188 8564_ $$s4590135$$uhttps://infoscience.epfl.ch/record/183188/files/SFS_TIP.pdf$$yn/a$$zn/a
000183188 909C0 $$0252394$$pLTS5$$xU10954
000183188 909CO $$ooai:infoscience.tind.io:183188$$pSTI$$particle
000183188 917Z8 $$x182750
000183188 917Z8 $$x115534
000183188 937__ $$aEPFL-ARTICLE-183188
000183188 973__ $$aOTHER$$rREVIEWED$$sPUBLISHED
000183188 980__ $$aARTICLE