Microlens array imaging system for photolithography
1996
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Details
Title
Microlens array imaging system for photolithography
Author(s)
Herzig, H. P. ; Nussbaum, P. ; Dandliker, R. ; Hugle, W. B. ; Volkel, R.
Published in
Optical Engineering
Volume
35
Issue
11
Pages
3323-30
Date
1996
ISSN
0091-3286
Keywords
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2013-01-17