Control of CVD-deposited ZnO films properties through water/DEZ ratio: Decoupling of electrode morphology and electrical characteristics
Nicolay, S.; Benkhaira, M.; Ding, L.; Escarre, J.; Bugnon, G.; Meillaud, F.; Ballif, C.
2012

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Abstract

In thiswork,itisshownthatvariationsintheratioofoxygentozincprecursorsatconstant temperatureallowchangingthesurfacemorphologyofzincoxide(ZnO)filmsdepositedbylow- pressuremetalorganicchemicalvapordeposition,whilekeepingthesheetresistanceandtransparency of thelayersconstant.ThisallowsdevelopingZnOlayerscombininginterestingpropertiessuchaslow surface roughness(below15nm)andlowsheetresistance(below15 O/&). Moregenerally,itisshown that thepyramidalfeaturedensitycanbecontrolledbytuningtheprecursorflows.Thisleadstofilm surfacescharacterizedbyzoneswitharoughmorphologymixedwithzoneswithalmostflatfeatures. Therefore,byusingthistechnique,thelight-scatteringabilityofafilmcanbecarefullytunedthrough its surfacemorphologywithoutaffectingtheconductivityortransparencyofthelayer.Thisprovidesan efficienttooltooptimizethefrontelectrodeofthin-filmsiliconsolarcellstoachievethebestpossible combinationofopen-circuitvoltage,fillfactorandphoto-generatedcurrent.Thepresentedsolutionis an in-situprocessachievableinstandarddepositionconditionsmakingiteasilyup-scalablewith existingproductionequipment.

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Title Control of CVD-deposited ZnO films properties through water/DEZ ratio: Decoupling of electrode morphology and electrical characteristics
Author(s) Nicolay, S. ; Benkhaira, M. ; Ding, L. ; Escarre, J. ; Bugnon, G. ; Meillaud, F. ; Ballif, C.
Published in Solar Energy Materials and Solar Cells
Pagination 7
Volume 105
Pages 46-52
Date 2012
Publisher Amsterdam, Elsevier
ISSN 0927-0248
Keywords
Note IMT-NE Number: 682
DOI https://doi.org/10.1016/j.solmat.2012.05.016
Other identifier(s) View record in Web of Science
Laboratories PV-LAB
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > PV-LAB - Photovoltaics and Thin Film Electronics Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Work produced at EPFL
Journal Articles
Published
Record creation date 2012-12-20

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