REFLOW OF NON-CIRCULAR NANO-PILLARS TO FABRICATE NANO-SCALE SOLID IMMERSION LENSES

We investigate the reflow of non-circular, i.e., triangular and square, shaped pillars to fabricate nano-scale solid immersion lenses (SILs). Electron beam lithography (EBL) and thermal reflow are the core of the fabrication process. For the optical characterization at λ = 642 nm, nano-SILs are replicated on a transparent substrate by soft lithography. The focal spots produced by the nano-SILs show both spotsize reduction and peak-intensity enhancement, which are consistent with the immersion effect.


Published in:
Proceedings of the IEEE Photonics Society International Conference on Optical MEMS & Nanophotonics, TuP29
Presented at:
IEEE Photonics Society International Conference on Optical MEMS & Nanophotonics, Banff, Alberta, Canada, August 6-9, 2012
Year:
2012
Publisher:
New York, Ieee
ISBN:
978-1-4577-1513-6
Keywords:
Laboratories:




 Record created 2012-10-26, last modified 2018-03-17

n/a:
Download fulltext
PDF

Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)