Investigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabrication
2012
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Details
Title
Investigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabrication
Author(s)
Kim, Myun-Sik ; Osowiecki, Gaël David ; Scharf, Toralf ; Keeler, Ethan ; Rydberg, Skyler ; Nakagawa, Wataru ; Herzig, Hans Peter
Published in
Proceedings of the EOS Annual Meeting 2012
Issue
5996
Conference
EOS Annual Meeting 2012, TOM 4 – Micro-Optics, Aberdeen, Scotland, UK, September 25-28, 2012
Date
2012
ISBN
978-3-9815022-4-4
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2012-10-26