Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor

This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo.


Published in:
Biomedical Microdevices, 14, 5, 819-828
Year:
2012
Publisher:
Dordrecht, Springer
ISSN:
1572-8781
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2012-10-15, last modified 2018-03-17

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