Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramic

This paper describes the fabrication of sub micrometer silicon oxycarbide (SiCO) ceramic structures. The method consists in replicating silicon micro/nanostructures in polydimethylsiloxane (PDMS), followed by a micro/nano molding of liquid polymer derived ceramic precursor (PDC). A dense ceramic SiCO replicated structure is obtained. In order to replicate the original structures with the highest fidelity possible, we applied a combination of coatings on the PDMS mold, in order to improve both filling and releasing. It was possible to fabricate reproducibly arrays of ceramic tips with a radius of 120 nm.


Published in:
Microelectronic Engineering, 97, 272-275
Year:
2012
Publisher:
Amsterdam, Elsevier
ISSN:
0167-9317
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2012-10-15, last modified 2018-03-17

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