Micro-fabricated alkali vapor cells sealed at low temperatures with thin-film metallic bonding

We report on the characterization of micro-fabricated alkali vapor cells, sealed by low-temperature thin-film metallic bonding. The low sealing temperatures ≤ 140°C are of high interest in view of future micro-fabricated cells using anti-relaxation wall coatings. Long-term measurements using saturated-absorption and double-resonance spectroscopy show a stable pressure inside the cells and therefore an excellent hermeticity of the bonding over several months. This is also confirmed by independent leak-rate measurements of indium bonded sample cells by a membrane deflection method.


Published in:
2012 IEEE International Frequency Control Symposium Proceedings, 1, 1-4
Presented at:
2012 IEEE International Frequency Control Symposium (FCS), Baltimore, USA, May 21-24, 2012
Year:
2012
Publisher:
IEEE
Laboratories:




 Record created 2012-09-03, last modified 2018-03-17


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