Mechanical and adhesion characterization of dry photoresist and porous films used for foil-level encapsulation of chemical sensors
2012
Details
Title
Mechanical and adhesion characterization of dry photoresist and porous films used for foil-level encapsulation of chemical sensors
Author(s)
Vasquez Quintero, Andres ; Briand, Danick ; de Rooij, Nico F.
Conference
MRS 2012 Spring Meeting, San Francisco, USA, April 9-12, 2012
Date
2012
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2012-08-30