Integrated nickel micro-nano-Hall sensors on SU-8 cantilevers for scanning Hall probe microscopy

We report the fabrication and characterization of nickel Hail sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 mu m(2) show a magnetic field resolution better than 1 mu T/Hz(1/2) in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.


Published in:
Transducers '07 & Eurosensors Xxi, Digest Of Technical Papers, Vols 1 And 2, U1303-U1304
Presented at:
14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, FRANCE, Jun 10-14, 2007
Year:
2007
Publisher:
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
ISBN:
978-1-4244-0841-2
Keywords:
Laboratories:




 Record created 2012-07-04, last modified 2018-01-28


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