Conference paper

Integrated nickel micro-nano-Hall sensors on SU-8 cantilevers for scanning Hall probe microscopy

We report the fabrication and characterization of nickel Hail sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 mu m(2) show a magnetic field resolution better than 1 mu T/Hz(1/2) in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.


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