Milli Newton force measurement and control for micro ultrasonic machining

Ultrasonic machining is performed using closed-loop Z-axis position and force control. Micromachining requires tools smaller than 100 micrometers in diameter, necessitating the use of forces in the low mN range.


Published in:
Proceedings Of The 15Th International Symposium On Electromachining, 375-379
Presented at:
15th International Symposium on Electromachining, Pittsburgh, PA, Apr 23-27, 2007
Year:
2007
Publisher:
Univ Nebraska-Lincoln, Industrial & Management Systems Engineering, Lincoln, Ne 68588 Usa
ISBN:
978-0-9794977-0-4
Keywords:
Laboratories:




 Record created 2012-07-04, last modified 2018-03-17


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