000178081 001__ 178081
000178081 005__ 20190812205615.0
000178081 0247_ $$2doi$$a10.1299/jamdsm.2.180
000178081 02470 $$2ISI$$a000270663200003
000178081 037__ $$aCONF
000178081 041__ $$aeng
000178081 245__ $$aDevelopment of SCARA-Type Haptic Device for Electrostatic Non-Contact Handling System
000178081 269__ $$a2008
000178081 260__ $$c2008
000178081 336__ $$aConference Papers
000178081 520__ $$aThis paper describes the development of a SCARA-type haptic device, which will be used to assist a human operator in non-contact object handling of silicon wafers using electrostatic levitation. The device has three degrees of freedom, of which only one (vertical) is actively controlled. By utilizing the admittance control paradigm, a high vertical stiffness and a high output force can be achieved. These properties are necessary for the intended application of non-contact object handling to prevent instabilities (induced by the human motion) of the electrostatic levitation system. As the nominal air gap between object and electrostatic levitator is in the order of 350 micrometer, with an allowable position error of about 150 micrometer, instability can easily occur if there is no haptic assistance, especially in the picking up or placing process. The developed SCARA-type haptic device has a mechanical stiffness of 51 N/mm for the vertical direction when it is in the weakest posture, which is sufficient for the non-contact handling task. The design and performance of the haptic device for the active vertical degree of freedom are described in this paper.
000178081 6531_ $$aScara
000178081 6531_ $$aHaptic
000178081 6531_ $$aHaptic Tweezer
000178081 6531_ $$aPick and Place
000178081 6531_ $$aMan Machine Interface
000178081 700__ $$uUniv Tokyo, Sch Engn, Dept Precis Engn, Adv Mechatron Lab,Bunkyo Ku, Tokyo 1138656, Japan$$avan West, Ewoud
000178081 700__ $$uUniv Tokyo, Sch Engn, Dept Precis Engn, Adv Mechatron Lab,Bunkyo Ku, Tokyo 1138656, Japan$$aYamamoto, Akio
000178081 700__ $$uEcole Polytech Fed Lausanne, Lab Syst Robot, CH-1015 Lausanne, Switzerland$$aBurns, Benjamin
000178081 700__ $$uUniv Tokyo, Sch Engn, Dept Precis Engn, Adv Mechatron Lab,Bunkyo Ku, Tokyo 1138656, Japan$$aHiguchi, Toshiro
000178081 7112_ $$d2007$$cSapporo, JAPAN$$a2nd International Conference on Manufacturing, Mechanical Design and Tribology
000178081 773__ $$j2$$tJournal Of Advanced Mechanical Design Systems And Manufacturing$$q180-190
000178081 909C0 $$pLSRO$$0252016
000178081 909CO $$ooai:infoscience.tind.io:178081$$pconf$$pSTI
000178081 917Z8 $$x104561
000178081 937__ $$aEPFL-CONF-178081
000178081 973__ $$rNON-REVIEWED$$sPUBLISHED$$aEPFL
000178081 980__ $$aCONF