A Dual-Axis High Fill-Factor Micromirror Array for High Thermal Loads
Ataman, C.; Lani, S.; Noell, W.; Jutzi, F.; Bayat, D.; de Rooij, N.
2011

Abstract

A high fill-factor, dual-axis micromirror array with novel spring and actuator design is developed for high thermal load applications. Each pixel can attain an omnidirectional mechanical DC rotation angle of +/- 4 degrees.

Details

Title A Dual-Axis High Fill-Factor Micromirror Array for High Thermal Loads
Author(s) Ataman, C. ; Lani, S. ; Noell, W. ; Jutzi, F. ; Bayat, D. ; de Rooij, N.
Published in Omn2011: 16Th International Conference On Optical Mems And Nanophotonics
Pages 135-136
Conference 16th International Conference on Optical MEMS and Nanophotonics (OMN), Istanbul, Turquie, Aug 08-11, 2011
Date 2011
Publisher Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
ISBN 978-1-4577-0336-2
Keywords
DOI https://doi.org/10.1109/OMEMS.2011.6031063
Other identifier(s) View record in Web of Science
Laboratories SAMLAB
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Conference Papers
Work produced at EPFL
Published
Record creation date 2012-06-12

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