A Dual-Axis High Fill-Factor Micromirror Array for High Thermal Loads

A high fill-factor, dual-axis micromirror array with novel spring and actuator design is developed for high thermal load applications. Each pixel can attain an omnidirectional mechanical DC rotation angle of +/- 4 degrees.


Published in:
Omn2011: 16Th International Conference On Optical Mems And Nanophotonics, 1, 135-136
Presented at:
16th International Conference on Optical MEMS and Nanophotonics (OMN), Istanbul, Turquie, Aug 08-11, 2011
Year:
2011
Publisher:
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
ISBN:
978-1-4577-0336-2
Keywords:
Laboratories:




 Record created 2012-06-12, last modified 2018-03-17


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