Addressable MEMS slit mask for multi-object spectroscopy based on multi-wafer stacking
Canonica, Michael; Noell, Wilfried; de Rooij, Nico; Zamkotsian, Frederic; Lanzoni, Patrick
2011

Abstract

MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated using multiple wafer-level bonding and implemented with individual addressing of each element.

Details

Title Addressable MEMS slit mask for multi-object spectroscopy based on multi-wafer stacking
Author(s) Canonica, Michael ; Noell, Wilfried ; de Rooij, Nico ; Zamkotsian, Frederic ; Lanzoni, Patrick
Published in Omn2011: 16Th International Conference On Optical Mems And Nanophotonics
Pages 129-130
Conference 16th International Conference on Optical MEMS and Nanophotonics (OMN), Istanbul, Turquie, Aug 08-11, 2011
Date 2011
Publisher Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
ISBN 978-1-4577-0336-2
Keywords
DOI https://doi.org/10.1109/OMEMS.2011.6031047
Other identifier(s) View record in Web of Science
Laboratories SAMLAB
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Conference Papers
Work produced at EPFL
Published
Record creation date 2012-06-12

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