Sensors and packages based on LTCC and thick-film technology for severe conditions
High temperatures, very high pressures and/or the presence of aggressive media cannot be covered by standard packaging methods, which only provide limited environmental stability. Ceramic technologies such as LTCC (Low Temperature Cofired Ceramic) and thick-film, on the other hand, offer easy manufacturability while achieving hermeticity / media isolation as well as outstanding chemical and thermal stability. This contribution will present several sensor and packaging applications of these technologies to devices which must perform under harsh conditions, as well as potential future developments
Keywords: couches épaisses ; thick-film technology ; LTCC ; technologie des couches épaisses ; capteurs ; sensors ; microfluidique ; microfluidics ; microréacteurs ; microreactors ; environnements sévères ; harsh environments
Présentation à Singapour, sur les capteurs réalisés au LPM pour travail en conditions sévères ; article correspondant publié dans Sadhana.
Record created on 2012-06-03, modified on 2016-08-09