Dynamically deformable reflective membrane for laser beam shaping and smoothing

We show a laser beam shaping device made of a deformable continuous reflective membrane fabricated over a scanning stage. The combination of two actuator schemes enables shaping and smoothing of a laser beam with a unique compact device. It is designed to shape an input laser beam into a flat top or Gaussian intensity profile, to support high optical load and to potentially reduce speckle contrast. One single electrode is needed to deform the whole membrane into multiple sub-reflecting concave elements. The scanning stage is used simultaneously to smooth out the remaining interference patterns. The fabrication process is based on SOI wafer and parylene refilling to enable the fabrication of a 100 % fill factor 5 by 5 mm(2) deformable membrane. Applications for such device are laser machining and laser display.


Published in:
Moems And Miniaturized Systems Xi, 8252, -
Presented at:
Conference on MOEMS and Miniaturized Systems XI, San Francisco, CA, Jan 24-25, 2012
Year:
2012
Publisher:
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa
ISBN:
978-0-8194-8895-4
Keywords:
Laboratories:




 Record created 2012-05-11, last modified 2018-09-13


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)